The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 02, 2009
Filed:
Feb. 28, 2003
Toshio Takagi, Nirasaki, JP;
Takeshi Sakuma, Minato-ku, JP;
Yuji Kato, Ebina, JP;
Kenji Matsumoto, Nirasaki, JP;
Toshio Takagi, Nirasaki, JP;
Takeshi Sakuma, Minato-ku, JP;
Yuji Kato, Ebina, JP;
Kenji Matsumoto, Nirasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A shower head structure disposed in a devicefor processing a semiconductor while supplying processing gas to a processing space S for storing a heated processed substrate W, comprising a shower headhaving a plurality of gas injection holesB for supplying the processing gas and a light introducing rodof a radiation thermometerinserted into at least one of the gas injection holesB.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile