Company Filing History:
Years Active: 2011-2013
Title: Yuichi Doki: Innovator in Substrate Processing Technology
Introduction
Yuichi Doki is a prominent inventor based in Koshi, Japan. He has made significant contributions to the field of substrate processing technology, holding a total of 3 patents. His work focuses on improving the efficiency and accuracy of substrate placement in processing systems.
Latest Patents
Doki's latest patents include a substrate processing system and a substrate placing position adjusting method. The substrate placing position adjusting method involves acquiring data on the substrate placing position where a substrate carrying unit is required to place a substrate on a substrate holding device. This device is capable of rotating about a vertical axis and is included in a processing unit for processing a substrate that is held substantially horizontally. The method comprises transferring a jig from the substrate carrying unit to the substrate holding device, measuring centrifugal acceleration at a specific measuring position in the jig, and calculating the eccentricity of that position from the rotation center of the substrate holding device based on the measured centrifugal acceleration.
The substrate processing system is designed for processing substrates, such as wafers, held by a substrate holding device that is rotatable about a vertical axis. In this system, a jig is placed on the substrate holding device, and the centrifugal acceleration imparted to a predetermined measuring position on the jig is determined. The position of the rotation center is established based on the centrifugal accelerations measured at three different positions of the jig, allowing for accurate data storage regarding the substrate placing position.
Career Highlights
Yuichi Doki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His innovative work has contributed to advancements in substrate processing technologies, enhancing the capabilities of the equipment used in this field.
Collaborations
Doki has collaborated with notable coworkers, including Tokutarou Hayashi and Koji Mahara. Their combined expertise has fostered a productive environment for innovation and development in substrate processing technologies.
Conclusion
Yuichi Doki's contributions to substrate processing technology through his patents and work at Tokyo Electron Limited highlight his role as a key innovator in the field. His advancements continue to influence the efficiency and accuracy of substrate processing systems.