The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 08, 2011
Filed:
Aug. 15, 2008
Applicants:
Yuichi Doki, Koshi, JP;
Koji Mahara, Koshi, JP;
Tokutarou Hayashi, Koshi, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01R 27/26 (2006.01);
U.S. Cl.
CPC ...
Abstract
In the present invention, a position detecting substrate having a capacitive sensor is supported on a transfer arm and transferred by the transfer arm and mounted on a mounting part. The capacitive sensor on the position detecting substrate then detects a position of a target object on the mounting part to detect a mounting position of the position detecting substrate on the mounting part. Based on the mounting position of the position detecting substrate, the moving position of the transfer arm when transferring a substrate is then adjusted.