Location History:
- Leuven, BE (2006)
- Mount Waverley, AU (2007 - 2009)
Company Filing History:
Years Active: 2006-2009
Title: Yuet Mei Wan: Innovator in Silicon Nitride Technology
Introduction
Yuet Mei Wan is a distinguished inventor based in Mount Waverley, Australia. She has made significant contributions to the field of materials science, particularly in the development of advanced silicon nitride films. With a total of 4 patents to her name, her work has garnered attention for its innovative approaches and practical applications.
Latest Patents
Yuet's latest patents include groundbreaking technologies that enhance the properties of silicon nitride films. One of her notable inventions is the "High stress nitride film and method for formation thereof." This patent describes a method for forming a silicon nitride film on a substrate by introducing trisilane and a reactive nitrogen species into a reaction chamber in separate pulses. The incorporation of a carbon precursor gas during this process allows for the creation of a high-stress silicon nitride film, which has various applications in electronics and materials engineering.
Another significant patent is the "Remote plasma activated nitridation." This invention utilizes a nitrogen precursor activated by exposure to remotely excited species to form nitrogen-containing layers. The process involves mixing excited species with NH flow, resulting in higher levels of nitrogen incorporation compared to traditional nitridation methods. This innovation has the potential to improve the performance and durability of semiconductor devices.
Career Highlights
Throughout her career, Yuet Mei Wan has worked with prominent companies in the semiconductor industry, including ASM International N.V. and ASM America, Inc. Her experience in these organizations has allowed her to refine her expertise in materials science and contribute to cutting-edge research and development.
Collaborations
Yuet has collaborated with notable professionals in her field, including Jacobus Johannes Beulens and Ruben Haverkort. These partnerships have facilitated the exchange of ideas and fostered advancements in silicon nitride technology.
Conclusion
Yuet Mei Wan is a remarkable inventor whose work in silicon nitride technology has made a significant impact on the materials science landscape. Her innovative patents and collaborations highlight her dedication to advancing technology and improving industry standards.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.