Company Filing History:
5 out of 3,768 
1 out of 18 
1 out of 34 Years Active: 2013-2024
Title: Innovations of Yuehong Fu
Introduction
Yuehong Fu is a notable inventor based in Fremont, CA, with a remarkable portfolio of seven patents. Her contributions to the field of substrate processing systems have significantly advanced technology in this area.
Latest Patents
One of her latest patents is titled "Substrate support with improved process uniformity." This invention features a substrate support designed to enhance the uniformity of processes in substrate processing systems. The design includes a baseplate and a ceramic layer positioned above it. The outer perimeter of the ceramic layer is encircled by an edge ring, with the outer radius of the ceramic layer exceeding the inner radius of the edge ring. This innovative design allows the outer edge of the ceramic layer to extend below the edge ring, improving overall performance.
Career Highlights
Yuehong Fu has worked with prominent companies such as Lam Research Corporation and Advanced Micro-Fabrication Equipment, Inc. Her experience in these organizations has contributed to her expertise and success as an inventor.
Collaborations
Some of her notable coworkers include Fangli J Hao and Zhigang Chen, who have collaborated with her on various projects.
Conclusion
Yuehong Fu's innovative work in substrate processing systems showcases her significant contributions to technology. Her patents reflect her dedication to improving process uniformity and advancing the field.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.