Company Filing History:
Years Active: 2021-2025
Title: Innovations of Yueh-Lin Yang
Introduction
Yueh-Lin Yang is a prominent inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His work focuses on improving the efficiency and effectiveness of electrostatic chucks used in semiconductor manufacturing.
Latest Patents
One of his latest patents is a method for cleaning an electrostatic chuck. This method involves emitting radiation toward the supporting surface of a chuck, which is designed to fix a semiconductor workpiece. The optical inspection instrument analyzes the reflection of the radiation to determine the presence of particles on the chuck's surface. If a particle is detected, it can be removed using a specialized cleaning tool equipped with an exhaust duct. Another patent details a method for detecting the location of a particle on the bottom surface of an electrostatic chuck. This method includes moving a platform to the particle's location and rotating it to effectively remove the particle.
Career Highlights
Yueh-Lin Yang works at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative approaches have contributed to advancements in manufacturing processes, enhancing the overall quality and reliability of semiconductor devices.
Collaborations
Yueh-Lin Yang collaborates with Chi-Hung Liao, a talented woman in the field. Their partnership exemplifies the importance of teamwork in driving innovation and achieving breakthroughs in technology.
Conclusion
Yueh-Lin Yang's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in manufacturing processes, ensuring the ongoing evolution of semiconductor technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.