Company Filing History:
Years Active: 2022-2025
Title: Innovations by Inventor Yuan Xue
Introduction
Yuan Xue is a notable inventor based in Xi'an, China. He has made significant contributions to the field of technology, particularly in the area of process chambers and physical vapor deposition systems. With a total of 3 patents to his name, Yuan Xue continues to push the boundaries of innovation.
Latest Patents
Yuan Xue's latest patents include groundbreaking methods and apparatus for controlling radio frequency electrode impedances in process chambers. This invention leverages an RF termination filter that provides an RF path to ground. In some embodiments, the apparatus includes a DC filter that is electrically connected between a DC power supply and electrodes embedded in an electrostatic chuck. The DC filter is designed to block DC current from flowing through it, while the RF termination filter adjusts the impedance of the electrodes relative to the RF ground.
Another significant patent involves the physical vapor deposition of piezoelectric films. This system features a deposition chamber, a substrate support, and a target within the chamber. The power supply applies power to the target to generate plasma, which sputters material onto the substrate to form a piezoelectric layer. The controller alternates between deposition and cooling phases, ensuring optimal performance during the process.
Career Highlights
Yuan Xue is currently employed at Applied Materials, Inc., a leading company in the field of materials engineering. His work focuses on developing advanced technologies that enhance manufacturing processes. His innovative spirit and technical expertise have made him a valuable asset to his team.
Collaborations
Yuan has collaborated with talented coworkers, including Abhijeet Laxman Sangle and Vijay Bhan Sharma. Their combined efforts contribute to the advancement of technology in their respective fields.
Conclusion
Yuan Xue's contributions to innovation and technology are commendable. His patents reflect a deep understanding of complex systems and a commitment to improving manufacturing processes. As he continues to innovate, his work will undoubtedly have a lasting impact on the industry.