The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2025
Filed:
Oct. 17, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Abhijeet Laxman Sangle, Maharashtra, IN;
Vijay Bhan Sharma, Rajasthan, IN;
Ankur Kadam, Maharashtra, IN;
Bharatwaj Ramakrishnan, San Jose, CA (US);
Visweswaren Sivaramakrishnan, Cupertino, CA (US);
Yuan Xue, Xi'an, CN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A physical vapor deposition system includes a deposition chamber, a support to hold a substrate in the deposition chamber, a target in the chamber, a power supply configured to apply power to the target to generate a plasma in the chamber to sputter material from the target onto the substrate to form a piezoelectric layer on the substrate, and a controller configured to cause the power supply to alternate between deposition phases in which the power supply applies power to the target and cooling phases in which power supply does not apply power to the target. Each deposition phase lasts at least 30 seconds and each cooling phase lasts at least 30 seconds.