Company Filing History:
2 out of 962 
1 out of 3 
1 out of 1 Years Active: 2000
Title: Innovations by Yuan-Ping Lee
Introduction
Yuan-Ping Lee is a notable inventor based in Singapore, recognized for his contributions to the field of semiconductor technology. He holds two patents that showcase his innovative approaches to material processing and photolithography.
Latest Patents
One of his latest patents is focused on the "Laser curing of spin-on dielectric thin films." This process involves curing low-k spin-on dielectric layers made from alkyl silsesquioxane polymers through laser scanning. The curing is achieved using both photothermal and photochemical mechanisms. The layers are deposited via spin deposition, dried, and cured by raster scanning with a pulsed laser at energies ranging from 0.1 to 1 Joules/cm². To prevent oxidation and moisture absorption, a nitrogen jet is applied behind the scanning laser beam for rapid cooling. The laser operates at wavelengths between 200 and 400 nm, ensuring that insulative layers like silicon oxide remain transparent and do not hinder the curing process.
Another significant patent is titled "Photoresist and polymer removal by UV laser aqueous oxidant." This method involves stripping photoresist and polymer from a wafer after a dry etch of a nitrade or polysilicon layer. The process includes immersing the wafer in a peroxydisulfate (S₂O₈²⁻)/HCl wet bath while irradiating it with a UV laser. This innovative technique effectively removes the photoresist and polymer layers, enhancing the efficiency of semiconductor manufacturing.
Career Highlights
Yuan-Ping Lee has worked with prominent organizations such as Chartered Semiconductor Manufacturing Ltd and the National University of Singapore. His experience in these institutions has significantly contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Throughout his career, Yuan-Ping Lee has collaborated with notable colleagues, including Chee Tee Chua and Mei Sheng Zhou. These collaborations have fostered advancements in their respective fields and have led to the development of innovative solutions in semiconductor processing.
Conclusion
Yuan-Ping Lee's contributions to semiconductor technology through his patents and collaborations highlight his role as a significant inventor in the industry. His innovative methods continue to influence advancements in material processing and photolithography.