Location History:
- Longjing Township, Taichung County, TW (2023)
- Longjing Township, TW (2023 - 2024)
- Taichung County, TW (2023 - 2024)
- Taichung, TW (2024)
Company Filing History:
Years Active: 2023-2025
Title: Innovations of Yuan-Hsin Chi
Introduction
Yuan-Hsin Chi is a prominent inventor based in Longjing, Taiwan. He has made significant contributions to the field of micro-electromechanical systems (MEMS) with a total of 14 patents to his name. His work focuses on improving manufacturing processes and enhancing the performance of MEMS devices.
Latest Patents
One of his latest patents is titled "Extended acid etch for oxide removal." This innovation describes a preclean process that may be omitted from a eutectic bonding sequence. By increasing the duration of an acid-based etch process, Yuan-Hsin Chi's method effectively removes oxide from the surfaces of a device wafer without the need for a preceding preclean process. This advancement reduces the complexity and cycle time of the eutectic bonding sequence, minimizes the risk of stiction between suspended mechanical components, and enhances overall process yield.
Another notable patent is "Wafer shift detection," which involves a wafer storage elevator and a method for detecting wafer position shifts. The elevator design includes two sidewalls and a storage seat, with mirror blocks that reflect a laser beam to determine wafer misalignment. This innovation is crucial for ensuring the accuracy and reliability of wafer handling in semiconductor manufacturing.
Career Highlights
Yuan-Hsin Chi is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has significantly impacted the efficiency and effectiveness of MEMS manufacturing processes.
Collaborations
He has collaborated with notable coworkers such as Sheng-Yuan Lin and Yin-Tun Chou, contributing to various projects that advance the field of semiconductor technology.
Conclusion
Yuan-Hsin Chi's innovative patents and contributions to the semiconductor industry highlight his expertise and commitment to enhancing MEMS technology. His work continues to influence the manufacturing processes that are vital for modern electronics.