This inventor holds 2 USPTO granted patents and 3 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2026.
Company Filing History:
Years Active: 2026
Title: Innovations by Yuan Chih Lo
Introduction
Yuan Chih Lo is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of lithography, particularly in the semiconductor industry. His work is recognized for its innovative approach to enhancing the lithography process.
Latest Patents
Yuan Chih Lo holds a patent for an "Additive for lithography." This method involves several steps, including the formation of a target layer on a substrate, followed by the creation of a resist layer on the target layer. The resist layer is then exposed to produce secondary electrons, which are subsequently terminated using an additive. Finally, the resist layer is developed, and the target layer is etched using the developed resist layer as a mask. This innovative method aims to improve the efficiency and effectiveness of lithography in semiconductor manufacturing.
Career Highlights
Yuan Chih Lo is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this company has allowed him to contribute to advancements in technology and manufacturing processes.
Collaborations
Yuan Chih Lo collaborates with Ching-Yu Chang, a fellow professional in the field. Their partnership exemplifies the importance of teamwork in driving innovation and achieving breakthroughs in technology.
Conclusion
Yuan Chih Lo's contributions to the field of lithography and his innovative patent demonstrate his commitment to advancing semiconductor technology. His work continues to influence the industry and pave the way for future innovations.