Yu-Ting Wen

Title: Innovations of Yu-Ting Wen in Semiconductor Technology

Introduction

Yu-Ting Wen is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on methods that enhance the efficiency and effectiveness of semiconductor device structures.

Latest Patents

Yu-Ting Wen's latest patents include innovative methods for forming semiconductor device structures. One of his notable patents describes a method that involves creating a contact opening in an interlayer dielectric (ILD) layer over an epitaxy source/drain region. This method includes forming a metal layer within the contact opening, which consists of top portions, side portions, and a bottom portion, with a defined space between the top portions. The process further involves a gradient metal removal technique to enlarge the space, followed by the formation of a sacrificial layer and subsequent recessing to expose portions of the sidewall. The method concludes with the removal of the top portions and the sacrificial layer, ultimately forming a bulk metal layer on the bottom portion.

Another significant patent focuses on contact features of semiconductor devices. This method includes forming a dielectric layer over an epitaxial source/drain region and creating an opening that exposes part of the region. A barrier layer is then formed, followed by an oxidation process that transforms portions of the barrier and dielectric layers. The opening is filled with a conductive material in a bottom-up manner, ensuring physical contact with the liner layer.

Career Highlights

Yu-Ting Wen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor devices, making them more efficient and reliable.

Collaborations

Throughout his career, Yu-Ting Wen has collaborated with talented individuals, including his coworkers Kai-Chieh Yang and Yu-Chen Ko. Their combined expertise has contributed to the successful development of innovative semiconductor technologies.

Conclusion

Yu-Ting Wen's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the development of advanced semiconductor devices, showcasing the importance of innovation in technology.