Zhubei, Taiwan

Yu-Hen Wu


Average Co-Inventor Count = 6.5

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 2019-2023

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6 patents (USPTO):Explore Patents

Title: The Innovations of Inventor Yu-Hen Wu

Introduction: Yu-Hen Wu is an accomplished inventor based in Zhubei, Taiwan, holding a total of six patents. His innovative contributions to the field of semiconductor technology have garnered attention and respect within the industry, particularly through his ingenious designs and methodologies.

Latest Patents: Among his recent advancements, Yu-Hen Wu has developed an "Apparatus for lithographically forming wafer identification marks and alignment marks." This invention introduces a lithographic substrate marking tool, which employs a dual electromagnetic radiation source that provides precision exposure to a photosensitive material over a substrate. Another notable patent is his "Edge-exposure tool with an ultraviolet (UV) light emitting diode (LED)," which includes a process chamber designed to expose only the edge portion of a photosensitive layer, thereby optimizing the manufacturing process. These patents illustrate his commitment to enhancing the efficiency and accuracy of semiconductor production.

Career Highlights: Yu-Hen Wu works with Taiwan Semiconductor Manufacturing Company Limited, a leader in the semiconductor manufacturing industry. His expertise in lithography and edge-assessment technology underscores the critical role he plays in advancing semiconductor fabrication techniques.

Collaborations: Throughout his career, Yu-Hen has collaborated with distinguished colleagues, including Ying-Hao Wang and Chia-Chi Chung. These partnerships have further propelled innovation within the company and have led to significant advancements in semiconductor technology.

Conclusion: Yu-Hen Wu's contributions to the field of semiconductor manufacturing through his inventive patents highlight the importance of innovation in technology. His work continues to pave the way for future advancements, making a lasting impact on the industry.

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