Location History:
- Tempe, AZ (US) (1988)
- Irvine, CA (US) (1988 - 1990)
Company Filing History:
2 out of 4,197 
2 out of 10 
1 out of 832,891 Years Active: 1988-1990
Title: Innovations of Yu C Chow in Semiconductor Technology
Introduction
Yu C Chow is a prominent inventor based in Irvine, California, known for his significant contributions to semiconductor technology. He holds five patents that showcase his expertise in fabricating advanced metal interconnection layers in multi-level metal semiconductor devices. His work has greatly influenced the efficiency and reliability of integrated circuits.
Latest Patents
Among his latest patents, one notable invention is the "Fully recessed interconnection scheme with titanium-tungsten." This patent describes a method of fabricating higher-order metal interconnection layers in a multi-level metal semiconductor device. The process involves creating a metal layer, an oxide layer, and a metal plug, followed by the formation of trenches to define the higher-order metal layer. The method enhances the performance of semiconductor devices by improving the interconnection quality.
Another significant patent is "Selective tungsten interconnection for yield enhancement." This invention outlines methods for fabricating metal interconnection lines in integrated circuits. The process includes depositing a layer of metal on an inter-dielectric oxide layer, followed by selective deposition of tungsten to repair broken metal lines. This innovative approach improves the yields of multi-level metal integrated circuits and enhances electromigration resistance.
Career Highlights
Yu C Chow has had a distinguished career, working with notable companies such as Hughes Aircraft Company and Spectrum CVD, Inc. His experience in these organizations has allowed him to develop and refine his innovative techniques in semiconductor fabrication.
Collaborations
Throughout his career, Yu C Chow has collaborated with talented individuals, including Maw-Rong Chin and Schyi-Yi Wu. These partnerships have contributed to the advancement of semiconductor technologies and the successful implementation of his patented methods.
Conclusion
Yu C Chow's contributions to semiconductor technology through his innovative patents have significantly impacted the field. His work continues to influence the design and fabrication of integrated circuits, ensuring improved performance and reliability in electronic devices.