Youngduk Suh

Title: Youngduk Suh: Innovator in Semiconductor Technology

Introduction

Youngduk Suh is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding three patents that showcase his innovative spirit and technical expertise.

Latest Patents

One of his latest patents is a semiconductor fabrication apparatus. This apparatus comprises a light source configured to emit light, a substrate stage arranged to receive a substrate exposed to the emitted light, a reticle arranged between the substrate stage and the light source, and a reticle stage arranged to receive the reticle. The reticle stage includes a lower plate, an upper plate arranged above the lower plate, an actuator connected to the lower plate configured to move in a direction parallel to the upper plate, a first cable slab arranged between the upper plate and the lower plate and connected to one side of the actuator, and a first cable cover that surrounds the outer periphery of the first cable slab and contacts the lower plate when the first cable slab becomes bent.

Another notable patent is a method of cleaning a collector of an extreme ultraviolet light source system. This method includes introducing the collector separated from the extreme ultraviolet light source system into a chamber. It captures an optical image of a reflective surface of the collector and measures a contamination level of the reflective surface by comparing the optical image with a prestored standard image. If the contamination level exceeds a preset first reference value, a first cleaning operation is performed, which includes cleaning the reflective surface by spraying dry ice particles onto it. If the contamination level is less than or equal to the preset first reference value, a second cleaning operation is performed, which includes cleaning the reflective surface by radiating atmospheric plasma onto it and measuring a microcontamination level and a damage level of the reflective surface.

Career Highlights

Youngduk Suh is currently employed at Samsung Electronics Co., Ltd., where he continues to push the boundaries of semiconductor technology. His work has been instrumental in advancing the capabilities of semiconductor fabrication and cleaning processes.

Collaborations

He collaborates with talented coworkers, including Changsoon Lim and Youngdo Kim, who contribute to the innovative projects at Samsung Electronics.

Conclusion

Youngduk Suh is a key figure in the semiconductor industry, with a focus on innovative solutions that enhance fabrication and cleaning processes. His patents reflect his commitment to advancing technology and improving efficiency in semiconductor manufacturing