The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 13, 2023
Filed:
Nov. 18, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Dong-Hyub Lee, Hwaseong-si, KR;
Kyungsik Kang, Bucheon-si, KR;
Jeong-Gil Kim, Hwaseong-si, KR;
Jinyong Kim, Yongin-si, KR;
Hochul Kim, Seoul, KR;
Yozo Matsuda, Suwon-si, KR;
Youngduk Suh, Seoul, KR;
Seungkoo Lee, Seoul, KR;
Sungho Jang, Hwaseong-si, KR;
Yoojin Jeong, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.