Location History:
- Seoul, KR (2021)
- Hwaseong-si, KR (2023)
Company Filing History:
Years Active: 2021-2025
Title: Innovations by Dong-Hyub Lee: Pioneering Contributions to Semiconductor Technology
Introduction: Dong-Hyub Lee is an accomplished inventor based in Seoul, South Korea, with two notable patents to his credit. His work primarily revolves around advancements in semiconductor technology, specifically focusing on extreme ultraviolet (EUV) collector inspection and plasma processing apparatus.
Latest Patents: Dong-Hyub Lee's most recent patents include an Extreme Ultraviolet (EUV) Collector Inspection Apparatus and Method. This invention provides a highly precise mechanism for inspecting the contamination state of an EUV collector, as well as its reflectance. The apparatus comprises a light source positioned in front of the EUV collector to emit light in the visible light (VIS) range from ultraviolet (UV) rays. It utilizes an optical device to output narrowband light and a camera capable of imaging across the UV to VIS spectrum. The result is an image by wavelength that enables thorough inspection of the EUV collector's contamination state.
Additionally, Lee's second patent pertains to antennas, circuits for generating plasma, plasma processing apparatus, and methods for manufacturing semiconductor devices. This invention details circuits that produce radio-frequency powers, antennas designed to convert these powers into plasma with specified mutual inductances, and inductors that connect the antennas to the power sources while effectively managing mutual inductance.
Career Highlights: Dong-Hyub Lee is a key innovator at Samsung Electronics Co., Ltd, where he applies his expertise in semiconductor technology to foster advancements that enhance manufacturing processes and product quality.
Collaborations: Throughout his career, Lee has collaborated with esteemed colleagues, including Dougyong Sung and Je-Hun Woo, pooling their skills to drive transformative innovations in the semiconductor field.
Conclusion: Dong-Hyub Lee's inventive contributions reflect his commitment to advancing semiconductor technology. His patents serve as a testament to his innovative spirit and the collaborative environment at Samsung Electronics Co., Ltd., ultimately enhancing the efficiency and efficacy of semiconductor manufacturing.