The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2021
Filed:
Oct. 03, 2017
Samsung Electronics Co., Ltd., Suwon-si, KR;
Dong-Hyub Lee, Seoul, KR;
Dougyong Sung, Seoul, KR;
Je-Hun Woo, Suwon-si, KR;
Bongseong Kim, Yongin-si, KR;
Juho Lee, Suwon-si, KR;
Yun-Kwang Jeon, Seoul, KR;
Junghyun Cho, Suwon-si, KR;
Abstract
Embodiments of the inventive concepts provide antennas, plasma generating circuits, plasma processing apparatus, and methods for manufacturing semiconductor devices using the same. The circuits include radio-frequency power sources generating radio-frequency powers, antennas receiving the radio-frequency powers to generate plasma and having a first mutual inductance, and inductors connecting the antennas to the radio-frequency power sources, respectively. The inductors have a second mutual inductance reducing and/or canceling the first mutual inductance.