The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2024
Filed:
Oct. 22, 2021
Samsung Electronics Co., Ltd., Suwon-si, KR;
Changsoon Lim, Hwaseong-si, KR;
Youngdo Kim, Hwaseong-si, KR;
Daewon Kang, Seoul, KR;
Chansoo Kang, Hwaseong-si, KR;
Hoonseop Kim, Suwon-si, KR;
Sangki Nam, Seongnam-si, KR;
Youngduk Suh, Seoul, KR;
Donghyub Lee, Hwaseong-si, KR;
Jonghun Pi, Gunwi-gun, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A method of cleaning a collector of an extreme ultraviolet light source system includes introducing the collector separated from the extreme ultraviolet light source system into a chamber; capturing an optical image of a reflective surface of the collector; measuring a contamination level of the reflective surface by comparing the optical image with a prestored standard image; performing a first cleaning operation if the contamination level exceeds a preset first reference value, the first cleaning operation including cleaning the reflective surface by spraying dry ice particles onto the reflective surface; and performing a second cleaning operation if the contamination level is less than or equal to the preset first reference value. The second cleaning operation includes cleaning the reflective surface by radiating atmospheric plasma onto the reflective surface and measuring a microcontamination level and a damage level of the reflective surface.