Location History:
- Seoul, KR (2022)
- Hwaseong-si, KR (2024)
Company Filing History:
Years Active: 2022-2025
Title: Innovations by Donghyub Lee
Introduction
Donghyub Lee is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, holding a total of 3 patents. His work focuses on enhancing the efficiency and effectiveness of EUV light source systems.
Latest Patents
One of his latest patents is the "EUV collector inspection apparatus and inspection method." This innovative apparatus includes a light blocking cover that shields the front surface of an EUV collector, creating a space where external light is blocked. It features a pillar-shaped light source that outputs irradiated light across the ultraviolet (UV) to visible light (VIS) spectrum. A spectrometer is positioned above the light source to detect the spectrum of reflected light, allowing for the inspection of contamination on the collector's surface.
Another notable patent is the "Method of cleaning collector of EUV light source system." This method involves introducing the collector into a chamber, capturing an optical image of its reflective surface, and measuring contamination levels by comparing the image with a standard. If contamination exceeds a preset threshold, a first cleaning operation is performed using dry ice particles. If the contamination is within acceptable limits, a second cleaning operation utilizes atmospheric plasma to further clean the surface.
Career Highlights
Donghyub Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in the field of EUV technology. His work has been instrumental in advancing the capabilities of EUV light source systems, which are critical for modern semiconductor manufacturing.
Collaborations
He collaborates with talented coworkers, including Sungho Jang and Yoonjae Kim, who contribute to the development and refinement of his innovative technologies.
Conclusion
Donghyub Lee's contributions to EUV technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as a key innovator in the field. His inventions are paving the way for advancements in semiconductor manufacturing and beyond.