Changsoon Lim

Title: The Innovative Contributions of Changsoon Lim

Introduction

Changsoon Lim is a prominent inventor located in Hwaseong-si, South Korea, known for his significant contributions to technology and engineering. With a total of two patents to his name, Lim focuses on advancements in plasma technology and semiconductor manufacturing processes.

Latest Patents

Changsoon Lim's latest patents exhibit his innovative approach and technical proficiency. One of his significant inventions is a device for measuring the density of plasma, which provides an efficient method to assess plasma conditions through a microwave spectrum analysis. This device includes a first sensor that measures the reflection parameter of plasma using a conductive material probe, paired with a second sensor that detects optical signals generated from the plasma.

Another notable patent is the method of cleaning the collector of an extreme ultraviolet light source system. This method involves capturing optical images of the collector's reflective surface and measuring its contamination level against a stored standard image. The process includes specific cleaning operations based on contamination levels, utilizing dry ice particles and atmospheric plasma for effective maintenance of the EUV light source system.

Career Highlights

Changsoon Lim is currently employed at Samsung Electronics Co., Ltd., where he utilizes his expertise in the development of cutting-edge technologies. His role in the company emphasizes his capabilities in leading innovative projects and collaborating with other engineering professionals.

Collaborations

Lim frequently collaborates with his coworker, Chansoo Kang, to push the boundaries of technology within their field. Their partnership fosters a creative environment that encourages the exploration of new ideas and solutions in the dynamic landscape of semiconductor and plasma technologies.

Conclusion

Changsoon Lim's contributions through his patents underscore his vital role in advancing the fields of plasma measurement and semiconductor manufacturing. His work at Samsung Electronics Co., Ltd. and collaborations with peers like Chansoo Kang have established him as a leading figure in technology innovation, paving the way for future advancements in these critical areas.