The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 10, 2024
Filed:
Jul. 27, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Vladimir Vsevolodovich Protopopov, Suwon-si, KR;
Vasily Grigorievich Pashkovskiy, Suwon-si, KR;
Chansoo Kang, Hwaseong-si, KR;
Youngdo Kim, Hwaseong-si, KR;
Hoonseop Kim, Suwon-si, KR;
Sangki Nam, Seongnam-si, KR;
Sejin Oh, Hwaseong-si, KR;
Changsoon Lim, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A device for measuring a density of plasma is provided. The device includes a first sensor configured to measure a microwave spectrum of an input port reflection parameter of plasma, the first sensor having a probe including a conductive material and a flat plate shape, and a second sensor configured to measure an optical signal generated from the plasma, the second sensor being configured to detect the optical signal through the probe of the first sensor.