Location History:
- Shiroyama-Machi, JP (2005)
- Tokyo-To, JP (2009)
Company Filing History:
Years Active: 2005-2009
Title: Youngchul Park: Innovator in Heat Treatment Technology
Introduction
Youngchul Park is a distinguished inventor based in Tokyo-to, Japan. He has made significant contributions to the field of heat treatment technology, holding 2 patents that showcase his innovative approach to temperature control in processing equipment.
Latest Patents
His latest patents include a heat treatment apparatus and a method of calibrating the apparatus. The first patent provides precise temperature estimation in a heat treatment apparatus that estimates temperatures of process objects by using a thermal model. This apparatus includes a processing vessel that accommodates multiple wafers, several heaters, and temperature sensors, all while storing the thermal model. The apparatus estimates the temperatures of the wafers based on sensor outputs and controls the heaters accordingly, ensuring effective heat treatment. The calibration of the thermal model is achieved by heating the processing vessel, measuring the temperatures of the wafers, and adjusting the model to ensure accuracy.
The second patent focuses on a heat treatment apparatus and controller that allows for temperature control without contaminating the objects being processed. This method ensures high accuracy by measuring temperatures without direct contact and correcting estimation errors based on a temperature recipe that defines the relationship between set temperatures and processing times.
Career Highlights
Youngchul Park is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has significantly advanced the capabilities of heat treatment processes, making them more efficient and reliable.
Collaborations
He collaborates with notable colleagues such as Kazuhiro Kawamura and Yuichi Takenaga, contributing to a dynamic team focused on innovation in technology.
Conclusion
Youngchul Park's contributions to heat treatment technology exemplify his commitment to innovation and precision in engineering. His patents reflect a deep understanding of thermal dynamics and a dedication to improving manufacturing processes.