The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 25, 2005
Filed:
Sep. 27, 2001
Wenling Wang, Shiroyama-Machi, JP;
Koichi Sakamoto, Shiroyama-Machi, JP;
Youngchul Park, Shiroyama-Machi, JP;
Fujio Suzuki, Shiroyama-Machi, JP;
Wenling Wang, Shiroyama-Machi, JP;
Koichi Sakamoto, Shiroyama-Machi, JP;
Youngchul Park, Shiroyama-Machi, JP;
Fujio Suzuki, Shiroyama-Machi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
Temperature control is made without the risk of contaminating object-to-be-processed and with high accuracy. Temperatures are metered out of contact with the objects-to-be-processed, and based on a metered result, estimated temperatures of the objects-to-be-processed are computed. Furthermore, estimation errors of the estimated temperatures are computed to correct the estimated temperatures. Based on a temperature recipe stating relationships between set temperatures and times and the corrected estimated temperatures, a heater is controlled.