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Seoul, South Korea

Young-Kyou Park

This inventor holds 13 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 1998-2007.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Young-Kyou Park. Retrieved from https://idiyas.com/inventor/young-kyou-park

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 13

% Patents Active = 69.2

Average Co-Inventor Count = 3.6

ph-index = 7

Forward Citations = 99(Granted Patents)


Company Filing History:

goldMedal13 out of 132,108 
 
Samsung Electronics Co., Ltd.
 patents

Years Active: 1998-2007

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13 patents (USPTO):Explore Patents
1. 7268853 - Exposing systems providing post exposure baking and related methods (2007-09-11),
2. 7208878 - Method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode (2007-04-24),
3. 7119489 - Rotation-magnetron-in-magnetron (RMIM) electrode, method of manufacturing the RMIM electrode, and sputtering apparatus including the RMIM electrode (2006-10-10),
4. 7109132 - High density plasma chemical vapor deposition process (2006-09-19),
5. 6953739 - Method for manufacturing a semiconductor device having hemispherical grains at very low atmospheric pressure using first, second, and third vacuum pumps (2005-10-11),
6. 6723215 - Sputtering apparatus for forming a metal film using a magnetic field (2004-04-20),
7. 6683010 - Method for forming silicon-oxynitride layer on semiconductor device (2004-01-27),
8. 6673673 - Method for manufacturing a semiconductor device having hemispherical grains (2004-01-06),
9. 6312987 - Method for manufacturing semiconductor device having hemispherical grain polysilicon film (2001-11-06),
10. 6090188 - Air intake apparatus of chemical vapor deposition equipment and method (2000-07-18),
11. 6074486 - Apparatus and method for manufacturing a semiconductor device having (2000-06-13),
12. 5842690 - Semiconductor wafer anchoring device (1998-12-01),
13. 5821152 - Methods of forming hemispherical grained silicon electrodes including (1998-10-13),

Title: Young-Kyou Park: Innovator in Photolithography and Electrode Manufacturing

Introduction

Young-Kyou Park is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the fields of photolithography and electrode manufacturing. With a total of 13 patents to his name, Park continues to push the boundaries of innovation in technology.

Latest Patents

One of his latest patents is focused on exposing systems that provide post-exposure baking and related methods. This system for photolithography includes an exposure chamber that offers a first isolated environment, an exposure stage within the chamber, a radiation source, and an interface chamber that provides a second isolated environment. The design allows for efficient wafer transport and post-exposure baking, enhancing the photolithography process. Another notable patent involves the method of manufacturing a rotation-magnetron-in-magnetron (RMIM) electrode. This innovative electrode features a unique magnet unit and a driver unit that supports off-axis rotation, optimizing the sputtering process.

Career Highlights

Young-Kyou Park is currently employed at Samsung Electronics Co., Ltd., where he applies his expertise in developing advanced technologies. His work has been instrumental in improving manufacturing processes and enhancing product performance.

Collaborations

Throughout his career, Park has collaborated with notable colleagues, including Chang-jip Yang and Chan-hee Han. These partnerships have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Young-Kyou Park is a distinguished inventor whose work in photolithography and electrode manufacturing has made a significant impact on the industry. His innovative patents and collaborations continue to drive advancements in technology.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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