The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2006
Filed:
Mar. 13, 2003
Jai-kwang Shin, Anyang, KR;
Seong-gu Kim, Pyeongtaek, KR;
Young-kyou Park, Seoul, KR;
Hyeon-ill Um, Seongnam, KR;
Jai-kwang Shin, Anyang, KR;
Seong-gu Kim, Pyeongtaek, KR;
Young-kyou Park, Seoul, KR;
Hyeon-ill Um, Seongnam, KR;
Samsung Electronics Co., Ltd., Suwon, KR;
Abstract
An RMIM electrode, a method for manufacturing the RMIM electrode, and a sputtering apparatus using the RMIM electrode, wherein the RMIM electrode includes a magnet unit including a cylinder-shaped magnet located at a center of the magnet unit and a plurality of ring-shaped magnets having increasingly larger diameters surrounding the cylinder-shaped magnet; and a driver unit for supporting and for off-axis-rotating the magnet unit, wherein in the magnet unit, adjacent magnets have opposite magnetization directions.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile