Young Eun Jeon

Title: Young Eun Jeon: Innovator in Substrate Processing Technologies

Introduction

Young Eun Jeon is a prominent inventor based in Ulsan, South Korea. He has made significant contributions to the field of substrate processing, holding a total of 2 patents. His innovative work focuses on methods and apparatuses that enhance the efficiency and effectiveness of substrate processing techniques.

Latest Patents

Young Eun Jeon's latest patents include an "Apparatus and method for processing substrate." This invention provides a substrate processing method capable of stably performing atomic layer etching without damaging a process chamber. The method involves providing a substrate with a target layer in a chamber, forming a first plasma using a chlorine-containing gas to reform the target layer, and subsequently forming a second plasma with an oxygen-containing gas to further reform the target layer. The process allows for the removal of portions of the target layer through repeated cycles of plasma formation and precursor reaction.

Another notable patent is the "Mask processing apparatus and substrate processing apparatus." This inventive concept includes a mask treatment apparatus that features a support unit for the mask and a light irradiation unit. The light irradiation unit adjusts the critical dimension of a pattern formed in the mask by modulating the light generated by a light source, thereby forming an irradiation pattern.

Career Highlights

Young Eun Jeon is currently employed at Semes Co., Ltd., where he continues to develop innovative technologies in substrate processing. His work has been instrumental in advancing the capabilities of substrate processing methods, making them more efficient and reliable.

Collaborations

Throughout his career, Young Eun Jeon has collaborated with talented individuals such as Tae Hee Kim and Ji Hoon Jeong. These collaborations have fostered a creative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Young Eun Jeon is a distinguished inventor whose contributions to substrate processing technologies have made a significant impact in the field. His patents reflect a commitment to innovation and excellence, positioning him as a key figure in advancing substrate processing methods.