Yosuke Okamoto

Title: Yosuke Okamoto: Innovator in Semiconductor Technology

Introduction

Yosuke Okamoto is a prominent inventor based in Mie, Japan, known for his significant contributions to semiconductor technology. With a total of 17 patents to his name, Okamoto has made remarkable advancements in position measuring methods and imprint devices.

Latest Patents

Okamoto's latest patents include a position measuring method, position measuring apparatus, and semiconductor device manufacturing method. In one embodiment of the position measuring method, alignment measurement in a light exposure process is executed by irradiating a first mark with light having a wavelength of λ1. This process involves a processing object that includes a first layer and a second layer stacked above a substrate, along with a resist applied on the second layer. The first mark is provided in the first layer and consists of a plurality of segments arranged at a pitch smaller than the resolution limit given by light having the wavelength of λ1. Overlay measurement is then executed by irradiating the first mark and a second mark with light having a wavelength of λ2, which is shorter than λ1. The second mark is formed by performing a light exposure and development process to the resist, and it also includes a plurality of segments arranged at the pitch.

Another notable patent is related to an imprint device and pattern forming method. This invention includes a holding unit, a mounting unit, a moving unit, a curing unit, a pressing portion, and a detecting portion. The holding unit is designed to hold a template with a pattern portion pressed onto a transfer portion provided on a substrate. The mounting unit is responsible for mounting the substrate, while the moving unit allows for movement in directions that either bring the holding unit and mounting unit closer together or push them apart. The curing unit cures the transfer portion onto which the pattern portion of the template is pressed, and the pressing portion pushes the template in a direction that intersects the pressing direction of the template. The detecting portion plays a crucial role in detecting the position of the template pushed by the pressing portion.

Career Highlights

Throughout his career, Yosuke Okamoto has worked with notable companies such as Kabushiki Kaisha Toshiba and Toshiba Memory Corporation. His work in these organizations has significantly influenced the field of semiconductor technology.

Collaborations

Okamoto has collaborated with esteemed colleagues, including Yoshinori Hagio and Manabu Takakuwa, contributing