The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 10, 2017
Filed:
Jun. 11, 2015
Applicant:
Toshiba Memory Corporation, Minato-ku, JP;
Inventors:
Hidenori Sato, Yokohama, JP;
Yosuke Okamoto, Sagamihara, JP;
Nobuhiro Komine, Nagoya, JP;
Manabu Takakuwa, Tsu, JP;
Assignee:
TOSHIBA MEMORY CORPORATION, Minato-ku, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/27 (2006.01); H01L 21/67 (2006.01); H01L 21/027 (2006.01); H01L 21/66 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G01B 11/272 (2013.01); G03F 7/70633 (2013.01); G03F 7/70783 (2013.01); H01L 21/0273 (2013.01); H01L 22/12 (2013.01); H01L 21/67288 (2013.01); H01L 22/20 (2013.01);
Abstract
According to one embodiment, an adjusting unit adjusts a refracting angle of incident light with respect to a substrate, a detector detects reflected light from the substrate, and a calculating unit calculates positional deviation of the pattern based on patterns respectively reflected in reflected lights obtained from the incident light generating N number of refracting angles with respect to the substrate, where N is an integer of two or greater.