Yoshio Susa

Title: Innovations of Yoshio Susa in Plasma Processing Technology.

Introduction

Yoshio Susa is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of advanced apparatuses that enhance processing methods in various applications.

Latest Patents

Yoshio Susa holds a patent for a plasma processing apparatus and method. This patent includes a processing chamber, an oscillator that outputs high-frequency power, and a power supply unit that supplies this power from a specific plasma generating location into the processing chamber. Additionally, it features a magnetic field forming unit that creates a magnetic field outside the processing chamber and a control unit that regulates this magnetic field. The relationship between the electron collision frequency of the plasma and the cyclotron frequency is a key aspect of this invention, ensuring that the cyclotron frequency exceeds the electron collision frequency.

Career Highlights

Yoshio Susa is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at this company has allowed him to push the boundaries of plasma processing technology and contribute to advancements in the field.

Collaborations

Yoshio has collaborated with notable colleagues such as Jun Yoshikawa and Naoki Matsumoto. These collaborations have fostered innovation and have been instrumental in the development of new technologies in plasma processing.

Conclusion

Yoshio Susa's contributions to plasma processing technology exemplify the impact of innovative thinking in the field. His patent and work at Tokyo Electron Limited highlight the importance of advancements in this area. His collaborations further enhance the potential for future innovations.