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Nirasaki, Japan

Yoshinori Marumo

USPTO Granted Patents = 6

Average Co-Inventor Count = 1.8

ph-index = 4

Forward Citations = 41(Granted Patents)

Location History:

Nirasaki, JP (2003 - 2005)
Chino, JP (2001 - 2007)

Company Filing History:

6 out of 10,295

Tokyo Electron Limited

Years Active: 2001-2007

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 7198662 - Electroless plating pre-treatment solution and electroles plating method (2007-04-03),

2. 6926817 - Solution processing apparatus and solution processing method (2005-08-09),

3. 6848457 - Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment (2005-02-01),

4. 6752855 - Solution treatment system and solution treatment method (2004-06-22),

5. 6607650 - Method of forming a plated layer to a predetermined thickness (2003-08-19),

6. 6331890 - Thickness measuring apparatus, substrate processing method, and substrate processing apparatus (2001-12-18),

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