Yoshinobu Mitano

Title: Innovations of Yoshinobu Mitano

Introduction

Yoshinobu Mitano is a notable inventor based in Mountain View, California. He has made significant contributions to the field of plasma processing technology. His innovative approach has led to the development of a unique plasma processing method and apparatus.

Latest Patents

Yoshinobu Mitano holds a patent for a plasma processing method and plasma processing apparatus. This invention involves supplying high-frequency power to a processing chamber, where an object is mounted. The method produces plasma in the chamber, allowing for the processing of the object in a plasma atmosphere. The high-frequency power is modulated by a low-frequency power, enhancing the efficiency of the plasma processing. The apparatus includes features that prevent plasma discharge in the gas introducing means when the process pressure is set at 0.5 Torr or less.

Career Highlights

Throughout his career, Yoshinobu Mitano has worked with prominent companies in the semiconductor industry. He has been associated with Tokyo Electron Limited and Tokyo Electron Yamanashi Limited. His experience in these organizations has contributed to his expertise in plasma processing technologies.

Collaborations

Yoshinobu Mitano has collaborated with notable colleagues, including Izumi Arai and Yoshifumi Tahara. Their combined efforts have further advanced the field of plasma processing.

Conclusion

Yoshinobu Mitano's contributions to plasma processing technology demonstrate his innovative spirit and dedication to advancing the field. His patent reflects a significant advancement in processing methods, showcasing the importance of innovation in technology.