Company Filing History:
Years Active: 2020-2025
Title: The Innovations of Yoshihiro Yanagi
Introduction
Yoshihiro Yanagi is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 3 patents. His work has been instrumental in advancing the efficiency and effectiveness of plasma processing apparatuses.
Latest Patents
Yanagi's latest patents include a plasma processing apparatus and a plasma processing method. The plasma processing apparatus features a plasma processing chamber, a base, an electrostatic chuck, and multiple electrode layers arranged in the same plane within the electrostatic chuck. It also includes a switch group with several first switches connected to the electrode layers, a power supply, and a measurement unit. The controller is designed to execute control operations that involve switching the connection destination of the switch group to the measurement unit and sequentially activating the first switches.
Another significant patent is the transfer method and transfer system. This method involves transferring a focus ring onto a stage using a transfer unit, positioning a measuring instrument within the focus ring, and acquiring measurement values. The transfer unit then adjusts the focus ring's position to ensure alignment with the electrostatic chuck based on the collected measurement data.
Career Highlights
Throughout his career, Yanagi has worked with prominent companies, including Tokyo Electron Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking innovations in plasma processing technology.
Collaborations
Yanagi has collaborated with notable colleagues such as Kippei Sugita and Daisuke Kawano. Their teamwork has fostered an environment of innovation and creativity, leading to advancements in their respective fields.
Conclusion
Yoshihiro Yanagi's contributions to plasma processing technology are noteworthy, with his patents reflecting his expertise and innovative spirit. His work continues to influence the industry and inspire future advancements.