Yoonho Son

Title: Yoonho Son: Innovator in Semiconductor Technology

Introduction

Yoonho Son is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on enhancing memory cell capacitors and manufacturing processes for semiconductor devices.

Latest Patents

One of Yoonho Son's latest patents is a memory cell capacitor with varying width and supportive structures. This semiconductor device includes a memory cell that stores data. The memory cell capacitor features a plurality of bottom electrodes on a substrate, extending vertically with respect to the substrate's top surface. These bottom electrodes are spaced apart in a first direction parallel to the substrate's top surface. Additionally, the design incorporates an upper support pattern on the upper lateral surfaces of the bottom electrodes and a lower support pattern on their lower lateral surfaces. The lower support pattern is positioned between the substrate and the upper support pattern, with the first bottom electrode featuring a recess adjacent to the lower support pattern's bottom surface.

Another notable patent involves a method of manufacturing semiconductor devices. In this process, a substrate with an insulating layer, including an oxide, is loaded into a chamber. A process gas containing an etching source gas is injected into the chamber to remove part of the insulating layer. This removal process is conducted in a pulse type, alternating between a first and second period multiple times. The etching source gas is supplied at a higher flow rate during the first period and at a lower flow rate during the second period. Throughout this process, the chamber's temperature is maintained at 100°C or more.

Career Highlights

Yoonho Son is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His innovative work has contributed to advancements in semiconductor technology, making him a valuable asset to his organization.

Collaborations

Yoonho has collaborated with notable coworkers, including Mongsup Lee and Inseak Hwang. Their combined expertise has further propelled advancements in their field.

Conclusion

Yoonho Son's contributions to semiconductor technology through his patents and work at Samsung Electronics Co., Ltd. highlight his role as an influential inventor. His innovative approaches continue to shape the future of the industry.