Company Filing History:
Years Active: 2019-2022
Title: Yoni Shalibo: Innovator in Metrology
Introduction
Yoni Shalibo is a prominent inventor based in Binyamina, Israel. He has made significant contributions to the field of metrology, particularly in the area of overlay measurement techniques. With a total of 3 patents to his name, Shalibo's work has advanced the accuracy and efficiency of measurement processes in semiconductor manufacturing.
Latest Patents
One of Shalibo's latest patents is focused on topographic phase control for overlay measurement. This innovation provides metrology tools and methods that estimate the effect of topographic phases corresponding to different diffraction orders. These phases result from light scattering on periodic targets, and the methods adjust measurement conditions to enhance accuracy. In imaging, overlay error magnification can be minimized by selecting appropriate measurement conditions based on the analysis of contrast function behavior. This includes changing illumination conditions, using polarizing targets, and employing multiple defocusing positions.
Another notable patent involves off-axis illumination overlay measurement using two-diffracted orders imaging. This method enhances measurement accuracy and simplifies the measurement process while improving the correspondence between metrology targets and semiconductor devices. The techniques involve illuminating the target in a Littrow configuration to yield measurement signals that are analyzed to derive metrology metrics.
Career Highlights
Yoni Shalibo is currently employed at KLA-Tencor Corporation, a leading company in the field of semiconductor process control and yield management. His work at KLA-Tencor has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in metrology tools and techniques.
Collaborations
Shalibo has collaborated with notable colleagues in his field, including Vladimir Levinski and Yuri Paskover. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge metrology solutions.
Conclusion
Yoni Shalibo's contributions to metrology through his patents and work at KLA-Tencor Corporation highlight his role as an influential inventor in the semiconductor industry. His innovative approaches continue to shape the future of measurement technologies.