Yong Hwan Lim

Title: Yong Hwan Lim: Innovator in Plasma Processing and Microfabrication

Introduction

Yong Hwan Lim is a notable inventor based in Jeollabuk-do, South Korea. He has made significant contributions to the fields of plasma processing and microfabrication, holding a total of 2 patents. His innovative work has implications for various technological applications, particularly in the semiconductor and biochip industries.

Latest Patents

One of Yong Hwan Lim's latest patents is an "Apparatus for Plasma Processing and Method for Plasma Processing." This invention provides a substrate supporter that securely holds a substrate, such as a wafer, while effectively removing impurities from its rear surface. The plasma processing apparatus includes at least one arm and a supporting portion that extends toward the substrate seating position. This design reduces the likelihood of arc discharges compared to conventional dry etching, thereby increasing process yield and product reliability.

Another significant patent is for a "Plastic Microfabricated Structure for Biochip, Microfabricated Thermal Device, Microfabricated Reactor, Microfabricated Reactor Array, and Micro Array Using the Same." This invention features a plastic microfabricated structure that can be applied to a biochip. It allows for the fabrication of a microfabricated heating device with a heating region made of insulating plastic. This design enables uniform temperature control at low power, facilitating rapid thermal treatment of various samples for reaction and analysis.

Career Highlights

Yong Hwan Lim has worked with several prominent companies, including Charm Engineering Co., Ltd. and the Electronics and Telecommunications Research Institute. His experience in these organizations has contributed to his expertise in plasma processing and microfabrication technologies.

Collaborations

Throughout his career, Yong Hwan Lim has collaborated with notable colleagues, including Kyung Ho Lee and Jae Ho Guahk. These partnerships have likely enhanced his innovative capabilities and contributed to the success of his projects.

Conclusion

Yong Hwan Lim is a distinguished inventor whose work in plasma processing and microfabrication has led to valuable patents and advancements in technology. His contributions continue to influence the fields of semiconductor manufacturing and biochip development.