Electronics and Telecommunications Research Institute

Charm Engineering Co., Ltd.

Yong Hwan Lim

Sung Jin Kim

Kwang Hyo Chung

Yun Tae Kim

Se Ho Park

Dae Sik Lee

Hae Sik Yang

Kyung Ho Lee

Kyu Won Kim

Kwan Goo Rha

Young Ki Han

Jae Chul Choi

Jung Hee Lee

Seng Hyun Chung

Hee Se Lee

Sun Q Jeon

Jae Ho Guahk

There is provided a substrate supporter capable of securely supporting a substrate such as a wafer on which a device having a predetermined thin film pattern is formed to remove various impurities formed on the rear surface of the substrate, and a plasma processing apparatus having the same. The plasma processing apparatus includes: at least one arm; and a supporting portion extending from the arm toward a substrate seating position of the substrate, so that the plasma processing apparatus can reduce the likelihood of arc discharges compared with conventional dry etching to increase process yield and product reliability, and ensure stable mounting of a substrate.

Apparatus for plasma processing and method for plasma processing

Provided are a plastic microfabricated structure, and a microfabricated thermal device, a microfabricated reactor, a microfabricated reactor array and a micro array using the same, which may be applied to a bio chip, and the present invention may fabricate the plastic microfabricated structure for providing a heating region by means of insulating plastic, which has a thin thickness, flatness enough to allow a photolithography process to be performed, thermal isolation in its some or total area, and a small thermal mass, and on top of the heating region of the plastic microfabricated structure, a heater, a temperature sensor for sensing a temperature, an electrode, and an electrode pad are formed to thereby fabricate the microfabricated heating device, whereby element may be readily fabricated at a low cost, and the heating region is formed of a plastic thin layer, so that uniform temperature control is possible even with a low power, and various samples may be thermally treated at a fast speed to obtain their reaction and analysis.

Plastic microfabricated structure for biochip, microfabricated thermal device, microfabricated reactor, microfabricated reactor array, and micro array using the same

Growing community of inventors

Jeollabuk-do, South Korea

Yong Hwan Lim