Company Filing History:
Years Active: 2023-2024
Title: Yingqian Chen: Innovator in Silicon Nitride Deposition
Introduction: Yingqian Chen is a notable inventor based in Singapore, SG, known for his innovative contributions to the field of materials science and engineering. With a total of two patents to his name, he has made significant strides in the development of chalcogen precursors for the deposition of silicon nitride films. His work has implications for various applications in semiconductor manufacturing.
Latest Patents: Yingqian Chen's latest patents focus on chalcogen silane precursors, which are essential for the effective deposition of silicon nitride (SiN) films on substrates. These patents describe methods that involve exposing the substrate to chalcogen silane and a reactant, facilitating the deposition of SiN films. The processes outlined can be executed through sequential or simultaneous exposures, and the chalcogen silane utilized is predominantly free of halogen. Additionally, he offers various options for the chalcogen element, including sulfur (S), selenium (Se), and tellurium (Te).
Career Highlights: Yingqian Chen is affiliated with Applied Materials, Inc., a leading company in the semiconductor and display industry. His work at Applied Materials underscores his commitment to advancing technologies that are pivotal for modern electronics. Through his innovative research, he continues to contribute to the enhancement of manufacturing processes and material quality in the industry.
Collaborations: Throughout his career, Yingqian Chen has collaborated with esteemed colleagues, including Michael G Haverty and Muthukumar Kaliappan. These partnerships reflect a shared commitment to innovation and advancement within their research endeavors.
Conclusion: Yingqian Chen's contributions to the field of silicon nitride deposition through his patented innovations highlight his role as a key figure in materials science. His work not only reinforces the importance of chalcogen precursors in semiconductor manufacturing but also showcases the potential for future advancements in this essential technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.