This inventor holds 13 USPTO granted patents. Top assignee: Advanced Micro Devices Corporation. Active years: 1997-1999.
Company Filing History:
Years Active: 1997-1999
Title: Innovations of Ying Shiau in Semiconductor Technology
Introduction
Ying Shiau is a prominent inventor based in San Jose, CA, known for his significant contributions to semiconductor technology. With a total of 13 patents, he has made remarkable advancements in the field, particularly in detecting defect sizes in polysilicon and source-drain semiconductor devices.
Latest Patents
Ying Shiau's latest patents include an innovative apparatus and method for detecting defect sizes in polysilicon and source-drain semiconductor devices. This invention features a double bridge test structure that incorporates a resistor path made of first semiconductor material, such as doped silicon, which consists of multiple strip segments and interconnection segments. Additionally, a series of strips made from second semiconductor material with lower resistivity are connected to create parallel circuit interconnections with the corresponding strip segments. The test structure is developed using masking techniques, allowing selective siliciding of portions of the silicon resistor or deposited polysilicon to form silicide and polycide. One embodiment of the invention utilizes polycide as low-resistivity strips to test for open and short-circuit defects in a polysilicon layer. Another embodiment focuses on selectively siliciding exposed portions of a source-drain resistor, facilitating the testing of defects in a source-drain layer of a metal oxide semiconductor. The sizes of defects are determined by comparing the measured resistance values with predetermined widths and spacings of the strips.
Career Highlights
Ying Shiau has established a successful career at Advanced Micro Devices Corporation, where he continues to innovate and contribute to the semiconductor industry. His work has been instrumental in enhancing the reliability and performance of semiconductor devices.
Collaborations
Ying Shiau has collaborated with notable coworkers, including Yung-Tao Lin and Zhi-Min Ling, to further advance their research and development efforts in semiconductor technology.
Conclusion
Ying Shiau's contributions to semiconductor technology through his patents and work at Advanced Micro Devices Corporation highlight his role as a leading inventor in the field. His innovative approaches to detecting defects in semiconductor devices continue to influence the industry positively.