Company Filing History:
Years Active: 2001-2003
Title: Innovations of Yin-Lang Wang
Introduction
Yin-Lang Wang is a notable inventor based in Tai-Chung, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 3 patents, Wang's work focuses on improving processes within chemical vapor deposition and measurement techniques.
Latest Patents
One of Wang's latest patents is titled "Method for improved cleaning in HDP-CVD process with reduced NF3 usage." This invention outlines a method for cleaning residual material from a chemical vapor deposition (CVD) apparatus in situ by employing dry etching. The process begins with the deposition of silicon oxide layers on substrates using a high-density plasma chemical vapor deposition (HDP-CVD) method. After the substrates are removed, the reactor chamber is sealed, filled with gas, and subjected to plasma formation. Oxygen is added, and the reactor is heated to enhance cleaning efficiency during the subsequent cleaning step.
Another significant patent is the "Template for measuring edge width and method of using." This invention provides a template designed to measure the edge width on a disk that lacks a coating layer on its top surface. The template consists of a transparent sheet that mirrors the contour of the disk being measured. It features a series of marks along the peripheral edge, which can be color-coded for easier identification. This innovative template is particularly useful for silicon wafers but can also be applied to disks of various shapes.
Career Highlights
Yin-Lang Wang is currently employed at Taiwan Semiconductor Manufacturing Company Ltd. His work at this leading semiconductor manufacturer has allowed him to develop and refine his innovative ideas, contributing to advancements in the industry.
Collaborations
Wang has collaborated with several talented individuals, including Wen-Kung Cheng and Hung-Ju Chien. These partnerships have fostered a creative environment that encourages the development of groundbreaking technologies.
Conclusion
Yin-Lang Wang's contributions to the field of semiconductor manufacturing through his innovative patents demonstrate his expertise and commitment to advancing technology. His work continues to influence the industry and inspire future innovations.