Yin-Bin Tseng

Title: Innovations by Yin-Bin Tseng

Introduction

Yin-Bin Tseng is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patent related to air curtain technology.

Latest Patents

One of Tseng's key inventions is the "Split Valve Air Curtain." This patent addresses contamination from outgassing during a deposition process by implementing a series of equipment enhancements. These enhancements include throttle valves, a dual air curtain, and a residual gas analysis (RGA) monitor. The dual air curtain is designed to flow a first gas during wafer processing and a second gas during wafer unloading, effectively redirecting and capturing outgassed species. Furthermore, the dual air curtain and throttle valves can be programmed within an automated feedback control system that utilizes data from the RGA monitor.

Career Highlights

Yin-Bin Tseng is associated with Taiwan Semiconductor Manufacturing Company Ltd., a leading player in the semiconductor industry. His work has been instrumental in advancing technologies that enhance manufacturing processes and improve product quality.

Collaborations

Tseng has collaborated with notable colleagues, including Jia-Wei Xu and Kai-Shiung Hsu, contributing to a dynamic and innovative work environment.

Conclusion

Yin-Bin Tseng's contributions to semiconductor technology through his innovative patent demonstrate his commitment to advancing the industry. His work continues to influence the field and improve manufacturing processes.