Yi Nung Wu

Title: Achievements of Inventor Yi Nung Wu in Hsinchu, TW

Introduction

Yi Nung Wu is an innovative inventor based in Hsinchu, Taiwan, recognized for his significant contributions to technology through his patented inventions. With a total of two patents under his name, he has made notable advancements in the field of substrate processing systems and cleaning processes for chamber components.

Latest Patents

One of Yi Nung Wu's latest patents is titled "Edge defect detection via image analytics." This invention encompasses a method that identifies an image of an edge of a susceptor pocket formed by a susceptor in a substrate processing system. The process includes predicting whether the property values of the edge meet specific threshold values based on the captured image. When those values are satisfied, corrective actions relating to the susceptor can be initiated, enhancing operational efficiency.

Another significant patent authored by Wu is the "High throughput and metal contamination control oven for chamber component cleaning process." This patent details methods and apparatus for a baking chamber specifically designed for processing chamber components. The innovative baking chamber features an enclosable first chamber body with a first floor, sidewalls, a lid, and various components such as a gas line, showerhead, exhaust, and heater, all aimed at improving cleaning procedures for chamber components.

Career Highlights

Yi Nung Wu is currently employed with Applied Materials, Inc., a leader in materials engineering solutions. His work in this prominent company has allowed him to leverage his patented inventions to drive advancements in technology. His commitment to innovating processes and systems positions him as an important contributor within the engineering sector.

Collaborations

During his career, Wu has collaborated with notable colleagues including Boon Sen Chan and Chien-Min Liao. Working together, they have contributed to the dynamic environment at Applied Materials, where teamwork is key to addressing complex engineering challenges.

Conclusion

In summary, Yi Nung Wu's inventive spirit and technical expertise have led to the development of pioneering technologies that advance the field of substrate processing and cleaning processes. With his patents, he not only showcases his exceptional skills as an inventor but also exemplifies the power of collaboration in driving innovation in the technology sector.