The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2025
Filed:
Sep. 21, 2022
Applied Materials, Inc., Santa Clara, CA (US);
Yash Chhabra, Bangalore, IN;
Abyaya Dhar, Bangalore, IN;
Joseph Liu, Zhubei, TW;
Yi Nung Wu, Taoyuan, TW;
Boon Sen Chan, Singapore, SG;
Sidda Reddy Kurakula, Bengaluru, IN;
Chandrasekhar Roy, Bangalore, IN;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
The present disclosure includes edge defect detection via image analytics. A method includes identifying an image of an edge of a susceptor pocket formed by a susceptor of a substrate processing system. The method further includes predicting, based on the image, whether property values of the edge of the susceptor meet threshold values. The method further includes, responsive to the property values of the edge meeting threshold values, causing performance of a corrective action associated with the susceptor.