Company Filing History:
Years Active: 2020-2025
**Title: The Innovative Contributions of Yi-Lin Wang**
Introduction
Yi-Lin Wang, an accomplished inventor based in Kaohsiung, Taiwan, has made significant strides in semiconductor processing technology. With a total of five patents to his name, his work has greatly enhanced the efficiency and effectiveness of deposition tools used in the industry.
Latest Patents
Among his latest innovations is a **shutter disc for a semiconductor processing tool**. This invention is designed to be used during a conditioning process within a processing chamber. The shutter disc features a wave-shaped section that helps reduce heat transfer and provides relief from thermal stresses. Additionally, it includes a thin-film material deposited on its backside, ensuring that there is a spacing between the inner edge of the thin-film material and the outer edge of the substrate support component. This innovative design prevents material accumulation and minimizes tilting errors caused by placement precision, ultimately enhancing operational performance. Another notable patent is a **method for improving the deposition process**, which involves placing a wafer on a holder while simultaneously blowing gas through ports onto its back surface during film deposition. The gases used in this process include nitrogen, helium, neon, and their combinations, showcasing his forward-thinking approach to improving semiconductor processing.
Career Highlights
Yi-Lin Wang is associated with Taiwan Semiconductor Manufacturing Company Limited, where he applies his expertise in semiconductor technologies. His contributions to the field have not only led to his patents but also positioned him as a leading figure in advancing semiconductor materials and processes.
Collaborations
Throughout his career, Yi-Lin has collaborated with esteemed coworkers like Chin-Szu Lee and Hua-Sheng Chiu. Their collective efforts highlight the importance of teamwork and collaboration in driving innovations and achieving breakthrough technologies in the semiconductor industry.
Conclusion
With his innovative patents and dedication to improving semiconductor processing, Yi-Lin Wang continues to be an influential inventor in the field. His work not only contributes to technological advancements but also sets the stage for future innovations in semiconductor manufacturing.
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