This inventor holds 3 USPTO granted patents and 6 published patent applications. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2017-2020.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2017-2020
Title: Yi-Ju Wang: Innovator in Semiconductor Technology
Introduction
Yi-Ju Wang is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of overlay measurement and improvement. With a total of 3 patents to his name, Wang continues to push the boundaries of innovation in his field.
Latest Patents
One of Yi-Ju Wang's latest patents is a system and method for measuring and improving overlay using electronic microscopic imaging and digital processing. This invention involves acquiring a scanning electron microscope (SEM) image that displays a metal line and a via hole positioned above the metal line. The via hole reveals a portion of the metal line that is vertically aligned with it. Notably, the first and second portions of the via hole are not vertically aligned with the metal line and are located on opposite sides of it. The SEM image is processed to enhance the contrast between these portions and their surrounding areas. Measurements of the first and second dimensions of the via hole are taken in a direction that differs from the direction along which the metal line extends. The overlay between the via hole and the metal line is then determined based on these dimensions.
Career Highlights
Yi-Ju Wang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on advancing technologies that improve manufacturing processes and product quality. Wang's innovative approaches have garnered attention and respect within the industry.
Collaborations
Throughout his career, Yi-Ju Wang has collaborated with notable colleagues, including Cheng-Ming Ho and Po Shun Lin. These partnerships have contributed to the development of cutting-edge technologies and have fostered a collaborative environment for innovation.
Conclusion
Yi-Ju Wang is a key figure in semiconductor innovation, with a focus on improving overlay measurement techniques. His contributions through patents and collaborations highlight his commitment to advancing technology in the semiconductor industry.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile