Yen-Min Liao

Title: Yen-Min Liao: Innovator in Semiconductor Technology

Introduction

Yen-Min Liao is a notable inventor based in Miaoli, Taiwan. He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches to cleaning and applying materials in semiconductor manufacturing.

Latest Patents

One of his latest patents is a method for cleaning a semiconductor substrate. This method involves applying a first agent onto the top surface of the semiconductor substrate while it is rotated at a first rotational frequency. The process continues with immersing the substrate in a second agent while rotating it at a second frequency, and finally, rotating the substrate at a third frequency while introducing a third agent onto its surface. The rotational frequencies are strategically chosen to optimize the cleaning process.

Another significant patent by Liao is a method for applying developer on a semiconductor wafer. This method includes moving a nozzle over the center of the wafer, which extends across its surface. The wafer is rotated by a dispensing rotation angle of less than 180 degrees while developer is dispensed relative to alignment marks on the wafer. This innovative approach enhances the precision of the application process.

Career Highlights

Yen-Min Liao is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work focuses on improving manufacturing processes and enhancing the efficiency of semiconductor production.

Collaborations

Liao collaborates with talented individuals in his field, including Hsiao-Yi Wang and Ming-Hung Lin. These collaborations foster innovation and contribute to advancements in semiconductor technology.

Conclusion

Yen-Min Liao's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the industry. His innovative methods for cleaning and applying materials are paving the way for advancements in semiconductor manufacturing.