This inventor holds 2 USPTO granted patents and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2005-2023.
Location History:
- Minato-ku, JP (2005)
- Nirasaki, JP (2023)
Company Filing History:
Years Active: 2005-2023
Title: Innovations by Yasushi Kodashima
Introduction
Yasushi Kodashima is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology. With a total of 2 patents to his name, his work focuses on advanced fabrication processes and apparatus for semiconductor devices.
Latest Patents
Kodashima's latest patents include a "Fabrication process flow of dielectric layer for isolation of nano-sheet devices on bulk silicon substrate." This patent describes a method for manufacturing a semiconductor device that involves forming a support on a side surface of a stack extending from a substrate. The stack consists of a second sacrificial film, multiple first sacrificial films, and several silicon (Si)-containing films. The method further details the removal of the second sacrificial film to create a space filled with a dielectric film.
Another notable patent is the "Processing apparatus, transferring apparatus and transferring method." This invention discloses a processing apparatus that includes a substrate container holding table, a first transferring chamber, and a second transferring chamber. The apparatus is designed to maintain specific pressures while processing target substrates, showcasing innovative mechanisms for substrate transfer.
Career Highlights
Yasushi Kodashima is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at this organization has allowed him to develop and refine his innovative ideas in semiconductor manufacturing.
Collaborations
Throughout his career, Kodashima has collaborated with notable colleagues such as Masanobu Igeta and Minoru Matsushita. These collaborations have contributed to the advancement of technology in their field.
Conclusion
Yasushi Kodashima's contributions to semiconductor technology through his patents and work at Tokyo Electron Limited highlight his role as an influential inventor. His innovative approaches continue to shape the future of semiconductor manufacturing.