Yasuo Imamura

Title: Yasuo Imamura: Pioneering Innovator in Semiconductor Technology

Introduction

Yasuo Imamura, a prominent inventor based in Yokohama, Japan, has made significant contributions to the field of semiconductor technology. With a total of three patents to his name, Imamura has focused his innovative efforts on enhancing manufacturing processes in the semiconductor industry.

Latest Patents

One of Imamura's latest patents is titled "Method of cleaning reaction tube and exhaustion piping system in heat." This invention pertains to a cleaning process that utilizes a gas containing ClF₃ at a concentration of 10 to 50 vol. % for the removal of polysilicon-based films deposited on various surfaces within a reaction tube during film formation, specifically while maintaining a temperature of 450°C or higher.

Another notable patent is the "Plasma etching apparatus." This innovative apparatus is designed for etching a WSi film on a wafer using a plasma gas containing a halogen element. The technology introduces a vacuum process chamber with upper and lower counter electrodes, ensuring uniform etching by correcting the distribution of tungsten halide on the wafer surface through a focus ring made of amorphous carbon and tungsten.

Career Highlights

Throughout his career, Yasuo Imamura has been associated with notable companies, including Tokyo Electron Limited and Kabushiki Kaisha Toshiba. His work in these esteemed organizations has empowered him to drive advancements in semiconductor manufacturing technology, contributing to the industry's robust growth.

Collaborations

Imamura's innovative journey has been further enriched through collaborations with fellow professionals, including notable coworkers Reiji Niino and Yoshiyuki Fujita. These partnerships have facilitated knowledge exchange and joint efforts in tackling complex challenges in the semiconductor realm.

Conclusion

In conclusion, Yasuo Imamura stands out as an influential inventor with a remarkable track record in semiconductor technology. His latest patents reflect his commitment to advancing manufacturing processes, showcasing the potential for greater efficiency and effectiveness in the industry. Imamura's contributions continue to inspire ongoing innovation and improvement in semiconductor fabrication techniques.