Location History:
- Kannabe-cho, JP (2011)
- Ibara, JP (2022)
Company Filing History:
Years Active: 2011-2025
Title: Innovations by Yasuhisa Sato
Introduction
Yasuhisa Sato is a notable inventor based in Ibara, Japan. He has made significant contributions to the field of semiconductor processing through his innovative patents. With a total of three patents to his name, Sato's work focuses on enhancing the efficiency and safety of transport devices used in semiconductor manufacturing.
Latest Patents
One of Sato's latest patents is a transport device having a local purge function. The purpose of this invention is to provide a cost-effective transport apparatus capable of moving a semiconductor wafer between a FOUP and a processing apparatus without exposing the wafer's surface to an oxidizing atmosphere. This transport apparatus includes a load port, a transport robot, an aligner, and a load lock chamber, all equipped with atmosphere-replacing functions. The invention ensures that the surface being processed of the semiconductor wafer has its atmosphere replaced locally during movement and positioning processes.
Another significant patent is a thin plate substrate-holding device and transfer robot. This holding device is designed to securely hold and transport a thin plate-shaped substrate after surface processing, preventing the formation of a natural oxide film on the processing surface. The device comprises a holding member, a purge plate with a flow path for inert gas, and a piping member connecting to an inert gas supply source. The purge plate features discharged ports that release inert gas onto the processing surface, ensuring optimal conditions during transport.
Career Highlights
Yasuhisa Sato is currently associated with Rorze Corporation, where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the capabilities of transport devices used in the industry.
Collaborations
Sato collaborates with notable colleagues, including Katsunori Sakata and Fumio Sakiya, who contribute to the development of innovative solutions in semiconductor processing.
Conclusion
Yasuhisa Sato's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and excellence in the field. His inventions not only enhance the efficiency of semiconductor manufacturing but also ensure the integrity of the materials being processed.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.