The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 18, 2022
Filed:
Jan. 17, 2019
Rorze Corporation, Hiroshima, JP;
Katsunori Sakata, Fukuyama, JP;
Yasuhisa Sato, Ibara, JP;
Abstract
Provided is a holding devicecapable of holding securely and transporting a thin plate-shaped substrate for which surface processing has been completed without causing a natural oxide film to form on the surface to be processed thereof. This holding devicecomprises a holding memberfor holding the thin plate-shaped substrate, a purge platehaving formed therein a flow pathfor the purpose of flowing therethrough an inert gas, and a piping member for connecting an inert gas supply source to the flow path. The purge plateis equipped with discharged ports, which communicate with the flow pathand are provided on a surface facing the surface to be processed of the thin plate-shaped substrate held by the holding member, for the purpose of discharging the inert gas onto the processing surface of the thin plate-shaped substrate. In addition, the holding deviceis equipped with a raising and lowering mechanismthat cause the holding memberand the purge plateto be raised and lowered relative to each other.